These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches.
This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication.
Produkteigenschaften
- Artikelnummer: 9780081003541
- Medium: Buch
- ISBN: 978-0-08-100354-1
- Verlag: Elsevier Science & Technology
- Erscheinungstermin: 18.11.2016
- Sprache(n): Englisch
- Auflage: Erscheinungsjahr 2016
- Produktform: Gebunden
- Gewicht: 1470 g
- Seiten: 634
- Format (B x H x T): 193 x 242 x 35 mm
- Ausgabetyp: Kein, Unbekannt